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Hello Please let me know the 1)materials used, 2)material parameters 3)fabrication techniques used in MEMS design based on 1) piezo-resistive ele... 1 6/17/2017
Are there any n-type doping materials which implants on silicon layer can be used as a stop etch layer ? Just like boron implantation on a layer act a... 0 1/3/2017
 
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