Ethylenediamine pyrocatechol
Encyclopedia
Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon
. A typical formulation consists of ethylenediamine, pyrocatechol
, pyrazine
and water. It is carcinogenic and very corrosive. It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.
Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. A tetravalent metalloid, it is less reactive than its chemical analog carbon, the nonmetal directly above it in the periodic table, but more reactive than germanium, the metalloid directly below it in the table...
. A typical formulation consists of ethylenediamine, pyrocatechol
Pyrocatechol
Catechol, also known as pyrocatechol or 1,2-dihydroxybenzene, is an organic compound with the molecular formula C6H42. It is the ortho isomer of the three isomeric benzenediols. This colourless compound occurs naturally in trace amounts...
, pyrazine
Pyrazine
Pyrazine is a heterocyclic aromatic organic compound with the chemical formula C4H4N2.Pyrazine is a symmetrical molecule with point group D2h. Derivatives like phenazine are well known for their antitumor, antibiotic and diuretic activity. Pyrazine is less basic in nature than pyridine, pyridazine...
and water. It is carcinogenic and very corrosive. It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.