Harold M. Manasevit
Encyclopedia
Dr. Harold M. Manasevit is an American materials scientist.
Manasevit received a B.S. Degree in Chemistry
from Ohio University
in 1950, M.S. in Chemistry
from Pennsylvania State University
in 1951, and Ph.D. in Physical Inorganic Chemistry
from the Illinois Institute of Technology
in 1959. He then joined the U.S. Borax Research Corp. in Anaheim, California
, but in 1960 left for the North American Aviation Company. In 1983 he joined TRW
as Senior Scientist.
Manasevit's career has focused on Chemical Vapor Deposition
(CVD) of materials. In 1963 he was the first to document epitaxial growth
of silicon on sapphire
, and in 1968 was the first to publish on metalorganic chemical vapor deposition (MOCVD) for the epitaxial growth of GaAs
. He has developed numerous CVD techniques for etching insulators and for producing semiconductor
and superconducting films on insulators.
Manesevit holds 16 patents, and was awarded the 1985 IEEE Morris N. Liebmann Memorial Award
"for pioneering work in metalorganic chemical vapor deposition, epitaxial-crystal reactor design, and demonstration of superior quality semiconductor devices grown by this process."
Stated by Russel D. Dupuis, "In the mid-1970s, International was developing the guidance systems for Minuteman missiles. It was necessary to design a system with radiation-hardened circuits so the missiles could go through these nuclear bomb clouds. One key feature of these circuits was the need for stability in the conductivity of the substrate. Silicon was the technology of choice, but it suffered when exposed to large amounts of radiation. My colleague, Harold Manasevit had the idea of growing silicon on a sapphire substrate, which was an insulator from radiation and infinitely stable. So he developed a technology called silicon on sapphire, or SOS, which was used in the Minuteman Missiles. He also developed an analogous process for the growth of gallium arsenide on sapphire." ---BN
Manasevit received a B.S. Degree in Chemistry
Chemistry
Chemistry is the science of matter, especially its chemical reactions, but also its composition, structure and properties. Chemistry is concerned with atoms and their interactions with other atoms, and particularly with the properties of chemical bonds....
from Ohio University
Ohio University
Ohio University is a public university located in the Midwestern United States in Athens, Ohio, situated on an campus...
in 1950, M.S. in Chemistry
Chemistry
Chemistry is the science of matter, especially its chemical reactions, but also its composition, structure and properties. Chemistry is concerned with atoms and their interactions with other atoms, and particularly with the properties of chemical bonds....
from Pennsylvania State University
Pennsylvania State University
The Pennsylvania State University, commonly referred to as Penn State or PSU, is a public research university with campuses and facilities throughout the state of Pennsylvania, United States. Founded in 1855, the university has a threefold mission of teaching, research, and public service...
in 1951, and Ph.D. in Physical Inorganic Chemistry
Inorganic chemistry
Inorganic chemistry is the branch of chemistry concerned with the properties and behavior of inorganic compounds. This field covers all chemical compounds except the myriad organic compounds , which are the subjects of organic chemistry...
from the Illinois Institute of Technology
Illinois Institute of Technology
Illinois Institute of Technology, commonly called Illinois Tech or IIT, is a private Ph.D.-granting university located in Chicago, Illinois, with programs in engineering, science, psychology, architecture, business, communications, industrial technology, information technology, design, and law...
in 1959. He then joined the U.S. Borax Research Corp. in Anaheim, California
Anaheim, California
Anaheim is a city in Orange County, California. As of the 2010 United States Census, the city population was about 365,463, making it the most populated city in Orange County, the 10th most-populated city in California, and ranked 54th in the United States...
, but in 1960 left for the North American Aviation Company. In 1983 he joined TRW
TRW
TRW Inc. was an American corporation involved in a variety of businesses, mainly aerospace, automotive, and credit reporting. It was a pioneer in multiple fields including electronic components, integrated circuits, computers, software and systems engineering. TRW built many spacecraft,...
as Senior Scientist.
Manasevit's career has focused on Chemical Vapor Deposition
Chemical vapor deposition
Chemical vapor deposition is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. In a typical CVD process, the wafer is exposed to one or more volatile precursors, which react and/or...
(CVD) of materials. In 1963 he was the first to document epitaxial growth
Epitaxy
Epitaxy refers to the deposition of a crystalline overlayer on a crystalline substrate, where the overlayer is in registry with the substrate. In other words, there must be one or more preferred orientations of the overlayer with respect to the substrate for this to be termed epitaxial growth. The...
of silicon on sapphire
Silicon on sapphire
Silicon on sapphire is a hetero-epitaxial process for integrated circuit manufacturing that consists of a thin layer of silicon grown on a sapphire wafer. SOS is part of the Silicon on Insulator family of CMOS technologies...
, and in 1968 was the first to publish on metalorganic chemical vapor deposition (MOCVD) for the epitaxial growth of GaAs
Gaas
Gaas is a commune in the Landes department in Aquitaine in south-western France....
. He has developed numerous CVD techniques for etching insulators and for producing semiconductor
Semiconductor
A semiconductor is a material with electrical conductivity due to electron flow intermediate in magnitude between that of a conductor and an insulator. This means a conductivity roughly in the range of 103 to 10−8 siemens per centimeter...
and superconducting films on insulators.
Manesevit holds 16 patents, and was awarded the 1985 IEEE Morris N. Liebmann Memorial Award
IEEE Morris N. Liebmann Memorial Award
The initially called Morris Liebmann Memorial Prize provided by the Institute of Radio Engineers , the IEEE Morris N. Liebmann Memorial Award was created in 1919 in honor of Colonel Morris N. Liebmann. It was initially given to awardees who had "made public during the recent past an important...
"for pioneering work in metalorganic chemical vapor deposition, epitaxial-crystal reactor design, and demonstration of superior quality semiconductor devices grown by this process."
Stated by Russel D. Dupuis, "In the mid-1970s, International was developing the guidance systems for Minuteman missiles. It was necessary to design a system with radiation-hardened circuits so the missiles could go through these nuclear bomb clouds. One key feature of these circuits was the need for stability in the conductivity of the substrate. Silicon was the technology of choice, but it suffered when exposed to large amounts of radiation. My colleague, Harold Manasevit had the idea of growing silicon on a sapphire substrate, which was an insulator from radiation and infinitely stable. So he developed a technology called silicon on sapphire, or SOS, which was used in the Minuteman Missiles. He also developed an analogous process for the growth of gallium arsenide on sapphire." ---BN