IEEE Transactions on Semiconductor Manufacturing
Encyclopedia
The IEEE Transactions on Semiconductor Manufacturing (SM) is a quarterly journal
published by the IEEE
Computer Society. It contains peer-reviewed articles and other contributions in the area of semiconductor device fabrication.
The journal covers areas of process and equipment control, simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, manufacturability improvement.
It is a joint publication of
Academic journal
An academic journal is a peer-reviewed periodical in which scholarship relating to a particular academic discipline is published. Academic journals serve as forums for the introduction and presentation for scrutiny of new research, and the critique of existing research...
published by the IEEE
Institute of Electrical and Electronics Engineers
The Institute of Electrical and Electronics Engineers is a non-profit professional association headquartered in New York City that is dedicated to advancing technological innovation and excellence...
Computer Society. It contains peer-reviewed articles and other contributions in the area of semiconductor device fabrication.
The journal covers areas of process and equipment control, simulation and modeling from the factory to the detailed process level, defect control, yield analysis and optimization, production planning and scheduling, environmental issues in semiconductor manufacturing, manufacturability improvement.
It is a joint publication of
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