Journal of Vacuum Science and Technology
Encyclopedia
The name Journal of Vacuum Science and Technology (JVST) combines two scientific journal
s, JVST A and JVST B, published by the American Vacuum Society
since 1964.
, electronic materials and processing, fusion technology, plasma technology, surface science
, thin films, vacuum metallurgy, and vacuum technology.
Editor: G. Lucovsky, Department of Physics, North Carolina State University
.
Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTAD6
of various materials, the structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices.
Editor: Gary E. McGuire, International Technology Center.
Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9
Scientific journal
In academic publishing, a scientific journal is a periodical publication intended to further the progress of science, usually by reporting new research. There are thousands of scientific journals in publication, and many more have been published at various points in the past...
s, JVST A and JVST B, published by the American Vacuum Society
American Vacuum Society
AVS: Science and Technology of Materials, Interfaces, and Processing is a not-for-profit learned society founded in 1953. AVS is a member society of the American Institute of Physics. AVS has approximately 5000 members worldwide from academia, governmental laboratories and industry...
since 1964.
History
- 1964–1982 Journal of Vacuum Science and Technology
- 1983–present Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 1983–1990 Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
- 1991–present Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
JVST A
Journal of Vacuum Science and Technology A specializes in applied surface scienceSurface science
Surface science is the study of physical and chemical phenomena that occur at the interface of two phases, including solid–liquid interfaces, solid–gas interfaces, solid–vacuum interfaces, and liquid-gas interfaces. It includes the fields of surface chemistry and surface physics. Some related...
, electronic materials and processing, fusion technology, plasma technology, surface science
Surface science
Surface science is the study of physical and chemical phenomena that occur at the interface of two phases, including solid–liquid interfaces, solid–gas interfaces, solid–vacuum interfaces, and liquid-gas interfaces. It includes the fields of surface chemistry and surface physics. Some related...
, thin films, vacuum metallurgy, and vacuum technology.
Editor: G. Lucovsky, Department of Physics, North Carolina State University
North Carolina State University
North Carolina State University at Raleigh is a public, coeducational, extensive research university located in Raleigh, North Carolina, United States. Commonly known as NC State, the university is part of the University of North Carolina system and is a land, sea, and space grant institution...
.
Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTAD6
JVST B
Journal of Vacuum Science and Technology B specializes in vacuum processing and plasma processingPlasma processing
Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.Plasma processing techniques include:*Plasma activation*Plasma etching*Plasma modification*Plasma functionalization...
of various materials, the structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices.
Editor: Gary E. McGuire, International Technology Center.
Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9