• Superfinishing
  Superfinishing
  Superfinishing, also known as micromachining and short-stroke honing, is a metalworking process that improves surface finish and workpiece geometry. This is achieved by removing just the thin amorphous surface layer left by the last process with an abrasive stone; this layer is usually about...
  
  , a metalworking process for producing very fine surface finishes
• Various microelectromechanical systems
  Microelectromechanical systems
  Microelectromechanical systems is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems and nanotechnology...
  
  
  • Bulk micromachining
    Bulk micromachining
    Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems .Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate...
    
    
  • Surface micromachining
    Surface micromachining
    Unlike Bulk micromachining, where a silicon substrate is selectively etched to produce structures, surface micromachining builds microstructures by deposition and etching of different structural layers on top of the substrate....
    
    
  • High-aspect-ratio microstructure technologies
    HARMST
    HARMST is an acronym for High Aspect Ratio Microstructure Technology that describes fabrication technologies,used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter and aspect ratios greater than 10:1...
    
    

See also

• High aspect ratio (HAR) silicon micromachining