Multilayer soft lithography
Encyclopedia
Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer
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Elastomer
An elastomer is a polymer with the property of viscoelasticity , generally having notably low Young's modulus and high yield strain compared with other materials. The term, which is derived from elastic polymer, is often used interchangeably with the term rubber, although the latter is preferred...
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