Scanning probe lithography
Encyclopedia
Scanning probe lithography describe a set of lithographic methods, in which a microscopic or nanoscopic stylus is moved mechanically across a surface to form a pattern.
This type of method can be split in two different groups:
This type of method can be split in two different groups:
- Constructive - In which the patterning is done by directly transferring chemical species to the surface (Dip Pen NanolithographyDip Pen NanolithographyDip Pen Nanolithography began as a scanning probe lithography technique where an atomic force microscope tip was used to transfer alkane thiolates to a gold surface. This technique allows surface patterning on scales of under 100 nanometers...
) - Destructive - In which the patterning is done by providing the substrate with energy (Either mechanical, or thermalThermal Probe LithographyThermal Probe Lithography is a form of Scanning Probe Lithography used to transcribe patterns or images to a surface at the micro or nanoscale...
, photonic, ionic, electronic, Xrays, and so on and so forth) to physically, chemically, electronically deform the substrate's surface. Examples include nanoimprint lithographyNanoimprint LithographyNanoimprint lithography is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer...
and local oxidation nanolithographyLocal oxidation nanolithographyLocal oxidation nanolithography is a tip-based nanofabrication method. It is based on the spatial confinement on an oxidation reaction under the sharp tip of an atomic force microscope....
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