Semiconductor process simulation is the modeling of the fabrication of semiconductor

Semiconductor fabrication

Semiconductor device fabrication is the process used to create the integrated circuits that are present in everyday electrical and electronic devices. It is a multiple-step sequence of photolithographic and chemical processing steps during which electronic circuits are gradually created on a wafer...

 devices such as transistor

Transistor

A transistor is a semiconductor device used to amplify and switch electronic signals and power. It is composed of a semiconductor material with at least three terminals for connection to an external circuit. A voltage or current applied to one pair of the transistor's terminals changes the current...

s. It is a branch of electronic design automation

Electronic design automation

Electronic design automation is a category of software tools for designing electronic systems such as printed circuit boards and integrated circuits...

, and part of a sub-field known as technology CAD

Technology CAD

Technology CAD is a branch of electronic design automation that models semiconductor fabrication and semiconductor device operation. The modeling of the fabrication is termed Process TCAD, while the modeling of the device operation is termed Device TCAD...

, or TCAD.

The ultimate goal of process simulation is an accurate prediction of the active dopant

Dopant

A dopant, also called a doping agent, is a trace impurity element that is inserted into a substance in order to alter the electrical properties or the optical properties of the substance. In the case of crystalline substances, the atoms of the dopant very commonly take the place of elements that...

 distribution, the stress distribution and the device geometry. Process simulation is typically used as an input for device simulation, the modeling of device electrical characteristics.