Ellipsometry is an optical technique for the investigation of the dielectric

Dielectric

A dielectric is an electrical insulator that can be polarized by an applied electric field. When a dielectric is placed in an electric field, electric charges do not flow through the material, as in a conductor, but only slightly shift from their average equilibrium positions causing dielectric...

 properties (complex refractive index

Refractive index

In optics the refractive index or index of refraction of a substance or medium is a measure of the speed of light in that medium. It is expressed as a ratio of the speed of light in vacuum relative to that in the considered medium....

 or dielectric function) of thin film

Thin film

A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction....

s.

It has applications in many different fields, from semiconductor

Semiconductor

A semiconductor is a material with electrical conductivity due to electron flow intermediate in magnitude between that of a conductor and an insulator. This means a conductivity roughly in the range of 103 to 10−8 siemens per centimeter...

 physics to microelectronics

Microelectronics

Microelectronics is a subfield of electronics. As the name suggests, microelectronics relates to the study and manufacture of very small electronic components. Usually, but not always, this means micrometre-scale or smaller,. These devices are made from semiconductors...

 and biology

Biology

Biology is a natural science concerned with the study of life and living organisms, including their structure, function, growth, origin, evolution, distribution, and taxonomy. Biology is a vast subject containing many subdivisions, topics, and disciplines...

, from basic research to industrial applications. Ellipsometry is a very sensitive measurement technique and provides unequalled capabilities for thin film metrology

Metrology

Metrology is the science of measurement. Metrology includes all theoretical and practical aspects of measurement. The word comes from Greek μέτρον , "measure" + "λόγος" , amongst others meaning "speech, oration, discourse, quote, study, calculation, reason"...

. As an optical technique, spectroscopic ellipsometry is non-destructive

Nondestructive testing

Nondestructive testing or Non-destructive testing is a wide group of analysis techniques used in science and industry to evaluate the properties of a material, component or system without causing damage....

 and contactless.

Upon the analysis of the change of polarization of light, which is reflected

Reflection (physics)

Reflection is the change in direction of a wavefront at an interface between two differentmedia so that the wavefront returns into the medium from which it originated. Common examples include the reflection of light, sound and water waves...

 off a sample, ellipsometry can yield information about layers that are thinner than the wavelength

Wavelength

In physics, the wavelength of a sinusoidal wave is the spatial period of the wave—the distance over which the wave's shape repeats.It is usually determined by considering the distance between consecutive corresponding points of the same phase, such as crests, troughs, or zero crossings, and is a...

 of the probing light itself, even down to a single atom

Atom

The atom is a basic unit of matter that consists of a dense central nucleus surrounded by a cloud of negatively charged electrons. The atomic nucleus contains a mix of positively charged protons and electrically neutral neutrons...

ic layer.