Hexafluoroacetylacetone
Encyclopedia
Hexafluoroacetylacetone is the chemical compound
with the formula
CF3C(O)CH2C(O)CF3 (often abbreviated as hfac). This colourless liquid is a ligand
precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acid
ity relative to analogous complexes derived from acetylacetone
.
This organofluorine
compound was first prepared by the condensation
of ethyl
ester
of trifluoroacetic acid
and 1,1,1-trifluoroacetone. It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics
.
Chemical compound
A chemical compound is a pure chemical substance consisting of two or more different chemical elements that can be separated into simpler substances by chemical reactions. Chemical compounds have a unique and defined chemical structure; they consist of a fixed ratio of atoms that are held together...
with the formula
Chemical formula
A chemical formula or molecular formula is a way of expressing information about the atoms that constitute a particular chemical compound....
CF3C(O)CH2C(O)CF3 (often abbreviated as hfac). This colourless liquid is a ligand
Ligand
In coordination chemistry, a ligand is an ion or molecule that binds to a central metal atom to form a coordination complex. The bonding between metal and ligand generally involves formal donation of one or more of the ligand's electron pairs. The nature of metal-ligand bonding can range from...
precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acid
Lewis acid
]The term Lewis acid refers to a definition of acid published by Gilbert N. Lewis in 1923, specifically: An acid substance is one which can employ a lone pair from another molecule in completing the stable group of one of its own atoms. Thus, H+ is a Lewis acid, since it can accept a lone pair,...
ity relative to analogous complexes derived from acetylacetone
Acetylacetone
Acetylacetone is an organic compound that famously exists in two tautomeric forms that rapidly interconvert. The less stable tautomer is a diketone formally named pentane-2,4-dione. The more common tautomer is the enol form. The pair of tautomers rapidly interconvert and are treated as a single...
.
This organofluorine
Organofluorine
Organofluorine compounds are organic chemical compounds that contain carbon and fluorine bonded in the polarized and remarkably strong carbon–fluorine bond. Organofluorine compounds are diverse, they can be fluorocarbons, perfluorinated, or biologically synthesized mono-fluorinated compounds, among...
compound was first prepared by the condensation
Condensation
Condensation is the change of the physical state of matter from gaseous phase into liquid phase, and is the reverse of vaporization. When the transition happens from the gaseous phase into the solid phase directly, the change is called deposition....
of ethyl
Ethyl group
In chemistry, an ethyl group is an alkyl substituent derived from ethane . It has the formula -C2H5 and is very often abbreviated -Et.Ethylation is the formation of a compound by introduction of the ethyl functional group, C2H5....
ester
Ester
Esters are chemical compounds derived by reacting an oxoacid with a hydroxyl compound such as an alcohol or phenol. Esters are usually derived from an inorganic acid or organic acid in which at least one -OH group is replaced by an -O-alkyl group, and most commonly from carboxylic acids and...
of trifluoroacetic acid
Trifluoroacetic acid
Trifluoroacetic acid is the simplest stable perfluorinated carboxylic acid chemical compound, with the formula CF3CO2H. It is a strong carboxylic acid due to the influence of the electronegative trifluoromethyl group. TFA is almost 100,000-fold more acidic than acetic acid...
and 1,1,1-trifluoroacetone. It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics
Microelectronics
Microelectronics is a subfield of electronics. As the name suggests, microelectronics relates to the study and manufacture of very small electronic components. Usually, but not always, this means micrometre-scale or smaller,. These devices are made from semiconductors...
.