Ion beam deposition
Encyclopedia
Ion Beam Deposition is a process of applying materials to a target through the application of an ion beam
.
An ion beam deposition apparatus typically consists of an ion source, ion optics and the deposition target. Optionally a mass analyzer can be incorporated.
In the ion source
source materials in the form of a gas, an evaporated solid, or a solution(liquid) are ionized using. For atomic ion IBD electron ionization
, field ionization (Penning ion source) or cathodic arc sources are employed. The later one is used particularly for carbon
ion deposition. Molecular ion beam deposition employes electrospray ionization
or MALDI sources.
The ions are then accelerated, focused or deflected using high voltages or magnetic fields. Optional deceleration at the substrate can be employed to define the deposition energy. This energy usually ranges from a few eV
up to a few keV. At low energy molecular ion beams are deposited intact (soft landing
) At a high deposition energy a molecular ion fragments, while atomic ions penetrate further into the material, a process known as ion implantation
.
Ion optics such as radio frequency quadrupoles can be mass selective. In IBD they are used to select a single, or a range of ion species for deposition in order to avoid contamination. In particular for organic materials, this process is often monitored by a mass spectrometer.
The ion beam current, which is quantitative measure for the deposited amount of material, can be monitored during the deposition process. Switching of the selected mass range can be used to define a stoichiometry
.
Ion beam
An ion beam is a type of charged particle beam consisting of ions. Ion beams have many uses in electronics manufacturing and other industries. A variety of ion beam sources exist, some derived from the mercury vapor thrusters developed by NASA in the 1960s.-Ion beam etching or sputtering:One type...
.
In the ion source
Ion source
An ion source is an electro-magnetic device that is used to create charged particles. These are used primarily to form ions for mass spectrometers, optical emission spectrometers, particle accelerators, ion implanters and ion engines.- Electron ionization :...
source materials in the form of a gas, an evaporated solid, or a solution(liquid) are ionized using. For atomic ion IBD electron ionization
Electron ionization
Electron ionization is an ionization method in which energetic electrons interact with gas phase atoms or molecules to produce ions...
, field ionization (Penning ion source) or cathodic arc sources are employed. The later one is used particularly for carbon
Carbon
Carbon is the chemical element with symbol C and atomic number 6. As a member of group 14 on the periodic table, it is nonmetallic and tetravalent—making four electrons available to form covalent chemical bonds...
ion deposition. Molecular ion beam deposition employes electrospray ionization
Electrospray ionization
Electrospray ionization is a technique used in mass spectrometry to produce ions. It is especially useful in producing ions from macromolecules because it overcomes the propensity of these molecules to fragment when ionized...
or MALDI sources.
The ions are then accelerated, focused or deflected using high voltages or magnetic fields. Optional deceleration at the substrate can be employed to define the deposition energy. This energy usually ranges from a few eV
Electronvolt
In physics, the electron volt is a unit of energy equal to approximately joule . By definition, it is equal to the amount of kinetic energy gained by a single unbound electron when it accelerates through an electric potential difference of one volt...
up to a few keV. At low energy molecular ion beams are deposited intact (soft landing
Soft landing
A soft landing in the business cycle is the process of an economy shifting from growth to slow-growth to potentially flat, as it approaches but avoids a recession. It is usually caused by government attempts to slow down inflation...
) At a high deposition energy a molecular ion fragments, while atomic ions penetrate further into the material, a process known as ion implantation
Ion implantation
Ion implantation is a materials engineering process by which ions of a material are accelerated in an electrical field and impacted into another solid. This process is used to change the physical, chemical, or electrical properties of the solid...
.
Ion optics such as radio frequency quadrupoles can be mass selective. In IBD they are used to select a single, or a range of ion species for deposition in order to avoid contamination. In particular for organic materials, this process is often monitored by a mass spectrometer.
The ion beam current, which is quantitative measure for the deposited amount of material, can be monitored during the deposition process. Switching of the selected mass range can be used to define a stoichiometry
Stoichiometry
Stoichiometry is a branch of chemistry that deals with the relative quantities of reactants and products in chemical reactions. In a balanced chemical reaction, the relations among quantities of reactants and products typically form a ratio of whole numbers...
.
See also
- Cathodic Arc DepositionCathodic Arc DepositionCathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode target. The vaporized material then condenses on a substrate, forming a thin film...
- Sputter depositionSputter depositionSputter deposition is a physical vapor deposition method of depositing thin films by sputtering, that is ejecting, material from a "target," that is source, which then deposits onto a "substrate," such as a silicon wafer...
- Ion beam assisted depositionIon beam assisted depositionIon beam assisted deposition or IBAD or ""IAD"" is a materials engineering technique which combines ion implantation with simultaneous sputtering or another physical vapor deposition technique...
- Ion beam induced deposition
- Electrospray ionizationElectrospray ionizationElectrospray ionization is a technique used in mass spectrometry to produce ions. It is especially useful in producing ions from macromolecules because it overcomes the propensity of these molecules to fragment when ionized...
- MALDI
- Soft LandingSoft landingA soft landing in the business cycle is the process of an economy shifting from growth to slow-growth to potentially flat, as it approaches but avoids a recession. It is usually caused by government attempts to slow down inflation...